Nanolithography

• Author : M. Gentili,Carlo Giovannella,Stefano Selci
• Publisher : Springer Science & Business Media
• Release : 09 March 2013

Success in the fabrication of structures at the nanometer length scale has opened up a new horizon to condensed matter physics: the study of quantum phenomena in confined boxes, wires, rings, etc. A new class of electronic devices based on this physics has been proposed, with the promise of a new functionality for ultrafast and/or ultradense electronic circuits. Such applications demand highly sophisticated fabrication techniques, the crucial one being lithography. Nanolithography contains updated reviews by major experts on the

• Author : M Feldman
• Publisher : Woodhead Publishing
• Release : 13 February 2014

Integrated circuits, and devices fabricated using the techniques developed for integrated circuits, have steadily gotten smaller, more complex, and more powerful. The rate of shrinking is astonishing – some components are now just a few dozen atoms wide. This book attempts to answer the questions, “What comes next? and “How do we get there? Nanolithography outlines the present state of the art in lithographic techniques, including optical projection in both deep and extreme ultraviolet, electron and ion beams, and imprinting. Special

• Author : Jagannathan Thirumalai
• Publisher : BoD – Books on Demand
• Release : 02 May 2018

The main objective of this book is to give proficient people a comprehensive review of up-to-date global improvements in hypothetical and experimental evidences, perspectives and prospects of some newsworthy instrumentation and its numerous technological applications for a wide range of lithographic fabrication techniques. The present theme of this book is concomitant with the lithographic ways and means of deposition, optimization parameters and their wide technological applications. This book consists of six chapters comprehending with eminence of lithography, fabrication and reproduction

• Author : D Bucknall
• Publisher : Elsevier
• Release : 30 September 2005

Techniques such as surface patterning have facilitated the emergence of advanced polymers with applications in areas such as microelectronics. Surface patterning of polymers has conventionally been undertaken by optical lithography. However, a new generation of nanolithographic and patterning techniques has made it possible to develop complex patterns at the nanoscale. Non-conventional lithography and patterning summarises this new range of techniques and their industrial applications. A number of chapters look at ways of forming and modifying surfaces for patterning. These are

• Author : Andrew Julius Muray
• Publisher : Unknown
• Release : 23 July 1985

• Author : Robert Theisen Fayfield
• Publisher : Unknown
• Release : 23 July 1995

• Author : Steven Wheng-Jing Kuan
• Publisher : Unknown
• Release : 23 July 1990

• Author : Anonim
• Publisher : Unknown
• Release : 23 July 2021

• Author : Yuansheng Ma
• Publisher : Unknown
• Release : 23 July 2021

• Author : Richard Charles Tiberio
• Publisher : Unknown
• Release : 23 July 1994

• Author : Stefan Landis
• Publisher : John Wiley & Sons
• Release : 04 March 2013

Lithography is an extremely complex tool – based on the concept of “imprinting” an original template version onto mass output – originally using relatively simple optical exposure, masking, and etching techniques, and now extended to include exposure to X-rays, high energy UV light, and electron beams – in processes developed to manufacture everyday products including those in the realms of consumer electronics, telecommunications, entertainment, and transportation, to name but a few. In the last few years, researchers and engineers have pushed the envelope

• Author : Royal Society of Chemistry
• Publisher : ISSN
• Release : 13 November 2019

This book discusses how the combination of physical and organic chemistry will continue to drive advances in the field, and provide new approaches to understanding, and in turn, creating biomimetic materials with precisely controlled nanoscale structure in three dimensions.

• Author : M. Feldman
• Publisher : Woodhead Publishing
• Release : 13 November 2017

Integrated circuits, and devices fabricated using the techniques developed for integrated circuits, have steadily gotten smaller, more complex, and more powerful. The rate of shrinking is astonishing some components are now just a few dozen atoms wide. This book attempts to answer the questions, What comes next? and How do we get there? Nanolithography outlines the present state of the art in lithographic techniques, including optical projection in both deep and extreme ultraviolet, electron and ion beams, and imprinting. Special

• Author : José M. de Teresa Nogueras
• Publisher : Unknown
• Release : 23 July 2021

A comprehensive edited volume on important and up-to-date nanolithography techniques and applications. The book includes an introduction on the importance of nanolithography in today's research and technology, providing examples of its applications. The remainder of the book is split into two sections. The first section contains the most important and established nanolithography techniques. As well as a detailed description of each technique, the reader can obtain useful information about the main advantages and drawbacks of each technique in terms of

• Author : Koji Sugioka,Ya Cheng
• Publisher : MDPI
• Release : 07 December 2018

This book is a printed edition of the Special Issue "Laser-Based Nano Fabrication and Nano Lithography" that was published in Nanomaterials