Download or Read online Nanolithography full in PDF, ePub and kindle. this book written by M. Gentili and published by Springer Science & Business Media which was released on 09 March 2013 with total page 216 pages. We cannot guarantee that Nanolithography book is available in the library, click Get Book button and read full online book in your kindle, tablet, IPAD, PC or mobile whenever and wherever You Like. Success in the fabrication of structures at the nanometer length scale has opened up a new horizon to condensed matter physics: the study of quantum phenomena in confined boxes, wires, rings, etc. A new class of electronic devices based on this physics has been proposed, with the promise of a new functionality for ultrafast and/or ultradense electronic circuits. Such applications demand highly sophisticated fabrication techniques, the crucial one being lithography. Nanolithography contains updated reviews by major experts on the well established techniques -- electron beam lithography (EBL), X-ray lithography (XRL), ion beam lithography (IBL) -- as well as on emergent techniques, such as scanning tunnelling lithography (STL).
Nanolithography
- Author : M. Gentili
- Publisher : Springer Science & Business Media
- Pages : 216 pages
- ISBN : 9401582610
- Release : 09 March 2013
- Rating : /5 from reviews